Data storage method for use in plasma process output supply system, involves storing data, which are stored in first in, first out memory, in permanent memory, during occurrence of preset event

摘要

The method involves storing data in a memory e.g. first in, first out ( FIPO) memory, and determining an occurrence of a predetermined event. The some of the data, which are stored in the former memory, are stored in another larger memory e.g. permanent memory, during the occurrence of the predetermined event. The data are stored in the former memory in predetermined timing interval, preferably less than twenty milliseconds. The data are stored in the former memory according to first in, first out principle. An independent claim is also included for a plasma process output supply system with a control.