发明名称 FUNCTIONAL ELEMENT, NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION USED IN THE SAME AND METHOD FOR MANUFACTURING FUNCTIONAL ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a negative photosensitive resin composition used in a functional element in which two bases placed opposite to each other are bonded together by way of a structure obtained from the negative photosensitive resin composition, the negative photosensitive resin composition being excellent in pattern resolution and in adhesiveness of the structure to the bases. <P>SOLUTION: In the functional element in which a second base is pressure-bonded onto a first base by way of a patterned structure provided by photolithography to bond the two bases together, a resin composition for forming the structure is the negative photosensitive resin composition comprising (A) an acrylic monomer, (B) a hydrogenated product of an alkali-soluble polymer obtained by copolymerizing an unsaturated carboxylic acid and another unsaturated compound or an alkali-soluble phenolic resin, (C) a photopolymerization initiator and (D) an epoxy compound. Such a negative photosensitive resin composition has excellent pattern resolution and excels also in adhesiveness to the opposite bases. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007304355(A) 申请公布日期 2007.11.22
申请号 JP20060133051 申请日期 2006.05.11
申请人 NIPPON KAYAKU CO LTD 发明人 UMEYAMA TOMOE;MIYAGAWA NAOFUSA;KAWADA YOSHIHIRO
分类号 G03F7/033;G02F1/1339;G03F7/004;G03F7/027;G03F7/40;G09F9/00;H01L21/027 主分类号 G03F7/033
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