DROP COATING DEVICE, DROP COATING METHOD, AND PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To definitely judge a nozzle which causes a defect in a drop discharge treated substrate for a short time.

SOLUTION: The drop coating device is provided with a drop discharging unit 11 having a plurality of nozzles provided to discharge drops onto the substrate, a pre-treatment non-discharge detector that detects the non-discharge of each nozzle before a substrate treatment in which the nozzle discharges the drops onto the substrate, a post-treatment non-discharge detector that detects the non-discharge of each nozzle after the substrate treatment, and a judging device that judges whether a defective substrate is present from the detection results of non-discharge by the pre-treatment non-discharge detector and from those of non-discharge by the post-treatment non-discharge detector.

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