| 摘要 |
PROBLEM TO BE SOLVED: To aim at elongation of life of a discharge tube as well as to set a wavelength range of ultraviolet rays wide. SOLUTION: The device is provided with a glass tube 12 formed in an elliptic toric shape sealing inert gas and mercury inside, outer electrodes 14 in contact with a surface of the glass tube 12, and a frequency conversion part 16 connected with the outer electrode 14. High-frequency voltage is impressed on the glass tube 12 to accelerate ionized charged particles. The outer electrodes 14 are provided at either side in a radius direction of the glass tube 12, at a position in correspondence with a minor diameter of the glass tube 12. COPYRIGHT: (C)2008,JPO&INPIT
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