| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump capable of miniaturizing and reducing cost, and improving a freedom degree of attachment of a device. SOLUTION: An operation unit 4 is detachably connected to a drive control unit 3, and the drive control unit 3 is operated by a device controller 11 when being mounted on a vacuum processing device 1, to thereby dispense with the operation unit 4. During maintenance of the pump, the operation unit 4 is connected to an input part C1 of the drive control unit 3, and the turbo molecular pump is operated by the operation unit 4. When the operation unit 4 is connected to the input part C1, the drive control unit 3 is automatically switched from a remote mode to an operation unit mode, and only an operation signal from the operation unit 4 is valid. COPYRIGHT: (C)2008,JPO&INPIT
|
