| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid droplet ejection head in which a diaphragm of a good smoothness can be formed. SOLUTION: A groove 72 and a through hole 76 are filled with first filler 78 and a second filler 79. A filling layer 85 of a structure of a plurality of layers with a denseness of the uppermost layer being increased than that of a lower layer, is formed in the groove 72 and the through hole 76. The uppermost layer of the filling layer 85 where the diaphragm 48 is formed, has a high denseness after thermally treated, and includes few voids. Hence a surface after subjected to surface treatment is prevented from being uneven, and a smoothness of the surface of the filling layer 85 is improved. The diaphragm 48 formed on the filling layer 85 is improved in smoothness as well. The diaphragm 48 of the good smoothness is formed accordingly. COPYRIGHT: (C)2008,JPO&INPIT
|
