| 摘要 |
The present invention relates to an interferometric measuring device having a short-coherent radiation source, a modulation interferometer and a downstream reference interferometer connected thereto. The mechanical coupling between the reference interferometer and the modulation interferometer is provided with a backlash. For equalizing an optical path difference in the interferometric measuring device, an optical path difference established in the modulation interferometer is reset in the reference interferometer. The optical path differences between the partial beams in the modulation interferometer and between the partial beams in the reference interferometer may be changed via optical components mechanically coupled with the aid of a backlash, the movable optical component of the reference interferometer following a movement of the movable optical component of the modulation interferometer after passing a backlash distance in the backlash.
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