发明名称 Micro-oscillation element
摘要 A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.
申请公布号 US2007268549(A1) 申请公布日期 2007.11.22
申请号 US20070878525 申请日期 2007.07.25
申请人 FUJITSU LIMITED;FUJITSU MEDIA DEVICES LIMITED 发明人 XIAOYU MI;UEDA SATOSHI;OKUDA HISAO;TSUBOI OSAMU;SONEDA HIROMITSU;KOUMA NORINAO;SAWAKI IPPEI;NAKAMURA YOSHITAKA
分类号 G02B26/00;G02B26/08;G02B26/10;H04N1/028;H04N1/036 主分类号 G02B26/00
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