发明名称 METHOD FOR MANUFACTURING BIPOLAR TRANSISTOR WITH LOW K MATERIAL IN EMITTER-BASE SPACER REGION
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a bipolar transistor with a low K material in an emitter-base spacer region. SOLUTION: The present invention provides the bipolar transistor located on a semiconductor wafer substrate. The bipolar transistor may include a collector located in the semiconductor wafer substrate, a base located in the collector, and an emitter located on the base and in contact with at least a portion of the base, wherein the emitter has a low K layer therein. The low K layer may be, for example, located in proximity to a side of the emitter, or located in proximity to opposing sides of the emitter. In all embodiments, however, the low K layer does not interfere with proper functions of the bipolar transistor, and substantially reduces the emitter-base capacitance typically associated with conventional bipolar transistors. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007306025(A) 申请公布日期 2007.11.22
申请号 JP20070187885 申请日期 2007.07.19
申请人 AGERE SYSTEMS GUARDIAN CORP 发明人 II-FEN CHAN;CHUNCHIEH HUANG;CHUNG WAI LEUNG;MA YI;SHAHRIAR MOINIAN
分类号 H01L21/331;H01L21/283;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;H01L29/08;H01L29/41;H01L29/417;H01L29/73 主分类号 H01L21/331
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