| 摘要 |
<p>A driving apparatus, an exposure apparatus, and a device manufacturing method are provided to decrease a foot print of the driving apparatus by overlapping at least a portion of a driving coil with a swap coil. A driving apparatus(SD) includes a stator(SM) and two movers(ST1,ST2). The stator includes first and second regions. The movers are movable on the stator and include a magnet. The stator includes a coil unit. The coil unit includes a driving coil(DC) and a swap coil(SC). The driving coil drives the movers in the first and second regions to be independently from each other. The swap coil replaces the movers between the first and second regions. At least one of the driving coils is arranged to be overlapped with the swap coil.</p> |
