| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a fluorine-containing polymer that has high functional group concentration, provides sufficient functional group properties and has high transparency in a wide wavelength range, to provide a method for producing the same and to obtain a resist composition containing the fluorine-containing polymer. <P>SOLUTION: The fluorine-containing copolymer has a unit derived from a monomer unit obtained by cyclic polymerization of a fluorine-containing monomer represented by formula CF<SB>2</SB>=CFCF<SB>2</SB>C(CF<SB>3</SB>)(OR<SP>7</SP>)-(CH<SB>2</SB>)<SB>n</SB>CR<SP>5</SP>=CHR<SP>6</SP>[R<SP>5</SP>and R<SP>6</SP>are each independently a hydrogen atom, a fluorine atom or a ≤12C alkyl group; R<SP>7</SP>is a group to be replaced with a halogen atom by an acid and is a ≤20C alkyl group, a ≤15C alkylcarbonyl group, a ≤15C alkoxycarbonyl group or a CH<SB>2</SB>R<SP>8</SP>(R<SP>8</SP>is a ≤15C alkoxycarbonyl group)]. <P>COPYRIGHT: (C)2008,JPO&INPIT |
