| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to support a mold in an arbitrary state for a supporting member. SOLUTION: Beveled portion 12a of a mold 12 is mounted on a supporting frame 32 and retained by a quartz glass plate, and the beveled portion 12a is made slidable freely in the range of clearance between the quartz glass plate and the mold 12, thus obtaining a predetermined posture of the mold 12 for a substrate 3. COPYRIGHT: (C)2008,JPO&INPIT
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