| 摘要 |
PROBLEM TO BE SOLVED: To suppress interference generated mutually between adjacent vibrators by the vibration of a vibration membrane. SOLUTION: The ultrasonic probe 2 is formed by arraying the plurality of vibrators 12 for mutually converting ultrasonic waves and electric signals, and the vibrator 12 comprises a substrate 15 and a plurality of vibration elements 16 provided on the substrate 15. Then, the vibration element 16 comprises the vibrating membrane 20 provided on the substrate 15 and a support part 22 forming a space 21 between the vibrating membrane 20 and the substrate 15 and supporting the vibrating membrane 20. Inside the support part 22, a low acoustic impedance part 25 for suppressing the ultrasonic waves propagated between the vibrating membrane 20 and the substrate 15 is provided. COPYRIGHT: (C)2008,JPO&INPIT
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