LAMINATED CLEANING SHEET AND TRANSPORTATION MEMBER WITH CLEANING FUNCTION USING THE LAMINATED CLEANING SHEET

摘要

PROBLEM TO BE SOLVED: To provide a laminated cleaning sheet which can reduce the number of times of operation for laminating a cleaning sheet to a transportation member when preparing the transportation member with a cleaning function. SOLUTION: The laminated cleaning sheet consists of two or more cleaning layers having adhesion property which is laminated so as to be peelable layer by layer to one side of a supporting base material, and a pressure-sensitive adhesion layer arranged on the other side of the supporting base material. The transportation member with the cleaning function is characterized by adhering the surface of the pressure-sensitive adhesion layer of the laminated cleaning sheet. This transportation member is transported into a substrate treatment apparatus to clean it. COPYRIGHT: (C)2008,JPO&INPIT