INSPECTING SYSTEM FOR BOARD SUBJECTED TO INSPECTION AND METHOD FOR INSPECTING BOARD SUBJECTED TO INSPECTION

摘要

An inspecting system and a method for inspecting a subject board are provided to be capable of effectively detecting phase unevenness occurring at a phase difference layer. The inspecting system is used for inspecting the subject board with the phase difference layer (3). The inspecting system is comprised of a polarized light source (50) for irradiating polarized light, and an observation side polarlizer (20) provided on a side of an observation side. In the inspecting system, the board to be inspected is set between the polarizer (50) and the observer side polarizer (20), wherein the polarized light is irradiated from the polarized light source (50) to the subject board, and at least either the observation side polarizer (20) or the subject board is made to be variable in set position.