FABRICATION OF MICROSTRUCTURES FOR MICRO/NANO-FLUIDIC DEVICES AND MEMS MICRODEVICES USING INORGANIC POLYMERS AND HYDROPHILIC POLYMERS

摘要

A method for producing an inorganic fluid pattern structure is provided to obtain a microstructure having excellent resistance against organic solvent permeation, heat stability and friction/wear characteristics through a cost-efficient process applied to plastic materials. A method for producing an inorganic fluid pattern structure comprises the steps of: (a) coating an inorganic polymer precursor onto a substrate having a nano-/micro-pattern; (b) carrying out crosslinking of the inorganic polymer by using any one process selected from a thermal crosslinking process and optical crosslinking process; and (c) separating the substrate from the crosslinked inorganic polymer to allow the pattern to be transferred to the crosslinked inorganic polymer. The crosslinked inorganic polymer is pyrolyzed at 600-1200°C under a non-activated gas.