摘要 |
Provided is a sputtering target for forming a phosphor film in an electroluminescence element, which can maintain high strength even when it is allowed to stand in the atmosphere for a long time. A target which has a chemical composition that Al: 20 to 50 mass %, Eu: 1 to 10 mass %, and the balance: Ba and inevitable impurities, and has a structure wherein Ba in which Eu is solid-solubilized and Al form an intermetallic compound phase, wherein the above intermetallic compound phase of Ba in which Eu is solid-solubilized comprises a BaAl4 intermetallic compound phase and a Ba7All3 intermetallic compound phase and Eu forms a solid solution with Ba in the above BaAl4 intermetallic compound and in the above Ba7All3 intermetallic compound, respectively.
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