| 摘要 |
PROBLEM TO BE SOLVED: To satisfactorily achieve failure diagnosis of production equipment. SOLUTION: Vibration data d2 corresponding to 20 frequency ranges sectioned into frequency ranges of 0-1,000 Hz to 19,000-20,000 Hz are extracted from vibration data d1 from a vibration sensor. From among the vibration data d2 corresponding to the 20 frequency ranges, the data having the minimum vibration variation quantity of an intermediate part between high-amplitude parts are calculated as the minimum vibration data d3 corresponding to the frequency range. A frequency range vibration signal conversion means 34 subjects the minimum vibration data d3 corresponding to the frequency range to Fast Fourier Transform to obtain power spectrum d4. When an area for determination g1 acquired from the power spectrum d4 is less than a predetermined reference area for determination g0, a determination means 35 diagnoses that a crack is generated in an intermediate socket. COPYRIGHT: (C)2008,JPO&INPIT
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