| 摘要 |
The method comprises a first step (S 1 in FIG. 1 ) of obtaining a transmission image, a second step (S 2 ) of applying a quadratic differential filter to the transmission image, thereby to emphasize a part of large luminance change as a quadratic differential filter image, a third step (S 3 ) of binarizing the quadratic differential filter image with a predetermined threshold value, and then storing the resulting binarized image, a fourth step (S 4 ) of binarizing the transmission image with another predetermined threshold value, and then storing the resulting binarized image, a fifth step (S 5 ) of performing the measurement of binary feature quantities for the binarized image stored at the third step (S 3 ) and the binarized image stored at the fourth step (S 4 ), and a sixth step (S 6 ) of deciding the quality of the object to-be-inspected from the binary feature quantities.
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