| 摘要 |
PROBLEM TO BE SOLVED: To prevent electrostatic breakdown and improve reliability in an optical element and a manufacturing method. SOLUTION: The optical element 100 includes: a light emitting element unit 160 made up of a conductor unit 102 of first conductive type arranged from the substrate side at an upper part of a substrate 101 and functioning as first mirror, a second semiconductor unit 103 functioning as active layer and third semiconductor units 104, 106 of second conductive type functioning as second mirror; and a rectifier cell unit made up of a first supporting unit 112 having the same composition as the first semiconductor unit and arranged from the substrate side at an upper part of the substrate, a second supporting unit 113 having the same composition as the second semiconductor unit, fourth semiconductor units 114, 116 of second conductive type, fifth semiconductor unit 117 made of material with larger etching speed than the fourth semiconductor unit, a capacitance reduction unit 118, and a sixth semiconductor unit 119 of first conductive type. COPYRIGHT: (C)2008,JPO&INPIT
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