| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting the state of particles such as spacers or the like discharged (applied) to a medium to be coated such as a substrate or the like by an ink jet, a dispenser or the like. SOLUTION: The method has: an applying step of applying the medium to be applied with an applying solution wherein particles are contained in a solvent; an illumination step of irradiating the medium to be applied with the light with a wavelength having high reflectivity of the particles as compared with reflectivity of the solvent as illumination light; an imaging step of receiving the reflected light from the medium to be applied to image the medium to be applied; and a determining step of determining the quality of the state of the particles contained in the applying solution applied to the medium to be applied on the basis of the taken image. COPYRIGHT: (C)2008,JPO&INPIT
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