发明名称 PROXIMITY SENSOR NOZZLE SHROUD WITH FLOW CURTAIN
摘要 The present invention is directed to an apparatus for reducing the impact of cross winds on a gas flow emitted from a nozzle (128). T apparatus includes a shroud (210) that affixes to the nozzle (128). A plenum (220) is located inside the shroud (210) that holds a shroud gas, which is fed into the plenum (220) through one or more intake holes (230). The shroud gas emitted out through a seires o openings such as holes or slots (242, 244), along the bottom surface of the shroud (210) in a direction away from the nozzle (128).
申请公布号 WO2006062985(A3) 申请公布日期 2007.11.22
申请号 WO2005US44144 申请日期 2005.12.07
申请人 ASML HOLDING N.V.;VOGEL, HERMAN 发明人 VOGEL, HERMAN
分类号 G01B13/08 主分类号 G01B13/08
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