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发明名称
REDUCED MAINTENANCE SPUTTERING CHAMBERS
摘要
申请公布号
EP1856712(A2)
申请公布日期
2007.11.21
申请号
EP20060717932
申请日期
2006.01.11
申请人
CARDINAL CG COMPANY
发明人
HARTIG, KLAUS
分类号
H01J37/34
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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