发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 Provided are a semiconductor device producing method making production steps therein simple while preventing a matter that wire bonding cannot be attained due to contamination of a bonding pad and preventing the generation of a warp in an adherend such as a substrate, a lead frame, or a semiconductor element, thereby improving the yield; an adhesive sheet used in this method; and a semiconductor device obtained by this method. The invention includes a pre-setting step of pre-setting a semiconductor element (13) to an adherend (11) through an adhesive sheet (12), and a wire bonding step of wire bonding the element (13) in the bonding temperatures range of 80 °C to 250 °C without performing any heating step, wherein, as the adhesive sheet (12), a sheet having a storage elastic modulus of 1 MPa or more in the temperature range of 80 °C to 250 °C or a storage elastic modulus of 1 MPa or more at any temperature in the temperature range before curing the sheet (12) is used.
申请公布号 EP1858069(A1) 申请公布日期 2007.11.21
申请号 EP20060714089 申请日期 2006.02.20
申请人 NITTO DENKO CORPORATION 发明人 MISUMI, SADAHITO;MATSUMURA, TAKESHI
分类号 H01L21/52;C09J133/00;C09J161/04;C09J163/00;H01L21/50;H01L21/60 主分类号 H01L21/52
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