| 摘要 |
An article support (2) constructed to support an article for lithographic processing purposes is disclosed. The article support includes a channel configuration (1) arranged to guide thermally stabilizing media in the article support to provide thermal stabilization to the article, wherein the channel configuration comprises an input channel structure (9) and an output channel structure (10), the input and output channel structures arranged in a nested configuration and connected to each other by a fine grid structure (11) provided at or near a surface of the article support. A lithographic apparatus and device manufacturing incorporating the article support is also disclosed.
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