| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To control the level of oxidation in higher precision at the positive electrode oxidation device applying electrochemical oxidation treatment on an object to be treated an oxidation layer and the manufacturing method of the oxide layer using the above, and at a field emission type electron source formed by the positive electrode oxidation and manufacturing method of the same. <P>SOLUTION: In addition to a DC source capable of flowing a DC from a contact member to a cathode electrode, an AC source capable of flowing AC from the contact member to the cathode electrode, and a control part for controlling the DC source and the AC source are provided in the positive electrode oxidation device. The control part controls the AC source, and detects the resistance of treatment liquid by the current driving and flowing between the contact member and the cathode electrode, and generated voltage. When controlling and driving the DC source, the control part is operated until the generated voltage between the contact member and the cathode electrode after deducting the voltage drop portion in the treatment liquid calculated from the detected resistance of treatment liquid, is increased up to a voltage value set in advance. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
