发明名称 |
Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
摘要 |
The cantilever array comprises a large number of compliant cantilevers (3) sliding on the surface (2) of the specimen (1), sliding device of guide and rotation mechanism, a sensor, a homodyne laser interferometer, and a laser Doppler interferometer with specimen light excitation function. |
申请公布号 |
EP1804050(A3) |
申请公布日期 |
2007.11.21 |
申请号 |
EP20070002543 |
申请日期 |
2002.06.12 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
KAWAKATSU, HIDEKI |
分类号 |
G01B11/30;B82B3/00;G01B9/02;G01B21/30;G01H9/00;G01Q10/00;G01Q10/04;G01Q20/02;G01Q30/04;G01Q60/32;G01Q60/38;G01Q70/00;G01Q70/06;G01Q70/12;G01Q70/16;G01Q90/00;G02B21/00 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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