| 摘要 |
A thin plate member (10) is a thin plate member that is formed by sintering, contains a ceramic layer, and comprises a thin part having two or more types of layers laminated, each of which is made of a material having a different thermal expansion coefficient, and a thick part that is made by laminating plural layers including at least all of the layers constituting the thin part, and has a thickness (tB) greater than the thickness of the thin part. The thin part has a shape warping in the direction perpendicular to the plane of the thin plate member. By virtue of this configuration, the internal electrical resistance of the thin part can be reduced. Further, the thin plate member can be provided that is difficult to be deformed with respect to the internal stress caused by the difference in thermal expansion coefficient between layers. |
