发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A semiconductor device and a manufacturing method of the same are provided to arrange and install a bump electrode by using a base layer including nickel on an electrode pad. A plurality of electrode pads(13) are arranged on one main surface of a semiconductor substrate(11). A copper layer is formed on a surface of each of the electrode pads. The copper layer is formed by using aluminum as a main material. A bump base layer is arranged on the electrode pads. A bump is arranged on the electrode pads through the bump base layer. The copper layer is formed with a discontinuous layer having a shape of spot or spackle or a shape of island. The density of the copper layer is reduced from the surface of each of the electrode pads in a thickness direction. The bump base layer is formed with a nickel layer. |
申请公布号 |
KR100778041(B1) |
申请公布日期 |
2007.11.21 |
申请号 |
KR20060114886 |
申请日期 |
2006.11.21 |
申请人 |
FUJITSU LIMITED |
发明人 |
MAKINO YUTAKA;OKAMOTO TADAHIRO;KURITA TAKAKI |
分类号 |
H01L23/50 |
主分类号 |
H01L23/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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