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发明名称
METHODS OF INSERTING OR REMOVING A SPECIES FROM A SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
EP1856722(A1)
申请公布日期
2007.11.21
申请号
EP20060718109
申请日期
2006.01.10
申请人
ENTEGRIS, INC.
发明人
SPIEGELMAN, JEFFREY, J.;ALVAREZ, DANIEL, JR.;COOK, JOSHUA, T.
分类号
H01L21/306;H01L21/44
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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