发明名称 PATTERNING METHOD USING COATINGS CONTAINING IONIC COMPONENTS
摘要 Disclosed is a method of forming a pattern by means of coatings containing an ionic component having a positive or negative electric charge using electrostatic attraction force and/or repulsion force. In the method, it is possible to significantly improve precision and efficiency of the pattern formation.
申请公布号 EP1856718(A1) 申请公布日期 2007.11.21
申请号 EP20060783621 申请日期 2006.08.17
申请人 LG CHEMICAL LIMITED 发明人 KIM, DAE-HYUN;KIM, JI-SU;SHIN, DONG-MYUNG;CHOI, DONG-CHANG;CHOI, KYUNG-SOO;JI, HO-CHAN;CHA, GEUN-YOUNG;KIM, SUNG-HYUN
分类号 H01L21/027 主分类号 H01L21/027
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