PATTERNING METHOD USING COATINGS CONTAINING IONIC COMPONENTS
摘要
Disclosed is a method of forming a pattern by means of coatings containing an ionic component having a positive or negative electric charge using electrostatic attraction force and/or repulsion force. In the method, it is possible to significantly improve precision and efficiency of the pattern formation.
申请公布号
EP1856718(A1)
申请公布日期
2007.11.21
申请号
EP20060783621
申请日期
2006.08.17
申请人
LG CHEMICAL LIMITED
发明人
KIM, DAE-HYUN;KIM, JI-SU;SHIN, DONG-MYUNG;CHOI, DONG-CHANG;CHOI, KYUNG-SOO;JI, HO-CHAN;CHA, GEUN-YOUNG;KIM, SUNG-HYUN