| 摘要 |
A method for manufacturing a micro lens array is provided to assure good optical characteristics by forming the surface of the micro lens array device as a hard face. A first photoresist pattern is formed on a substrate, and a first lens pattern is formed by flowing the first photoresist pattern. A first protection film is deposited on the first lens pattern. A first structure is formed on the substrate including the first protection film. The rugged part on the substrate formed by the first lens pattern is projected to the first structure. The first structure is left by removing the substrate, the first lens pattern and the first protection film. A second protection film is deposited on the surface of the first structure, and a second structure is formed on the first structure. The rugged part formed on the surface of the second protection film is projected to the second structure. The second structure with a first micro lens pattern is left by removing the first structure. A second photoresist pattern is formed on the first micro lens pattern, and a second lens pattern is formed by flowing the second photoresist pattern. A third protection film is deposited on the second lens pattern. A third structure(290) projected with the rugged part on the second structure including the second lens pattern and the first micro lens pattern is formed. The third structure is left by removing the second structure and the second lens pattern. A micro lens array device is fabricated by using the third structure as a metal cast.
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