发明名称 Angular velocity sensor
摘要 An angular velocity sensor 1 includes support members 10 A<SUB>1</SUB> , 10 A<SUB>2</SUB> , 10 B<SUB>1 </SUB>and 10 B<SUB>2</SUB>, bonded to two nodal points of a pillar-shaped oscillator, generated on oscillations of the oscillator, in a manner of sandwiching the nodal points from upper and lower sides of the oscillator. The support members simultaneously serve for mechanically supporting and providing for electrical connection of the oscillator. Upper support members 10 A<SUB>1</SUB> , 10 A<SUB>2 </SUB>and lower support members 10 B<SUB>1 </SUB>and 10 B<SUB>2 </SUB>for the nodal points include bent parts, the bent parts being bent in the same direction with respect to the longitudinal direction of the oscillator. The upper support members and lower support members also include arms 11 extending at right angles to the up-and-down direction and to the longitudinal direction of the oscillator and connecting portion 13 for the arms and the oscillator.
申请公布号 US7296467(B2) 申请公布日期 2007.11.20
申请号 US20040957129 申请日期 2004.10.01
申请人 SONY CORPORATION 发明人 KAWAMURA TOSHIYUKI;SATOH YOSHINORI;MATSUNAGA TORU;MAEDA TAKESHI;SASAKI NAOYA;CHIBA KAZUHIRO
分类号 G01C19/00;G01P9/04;G01C19/56;G01P15/08;H01L41/08;H01L41/187 主分类号 G01C19/00
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