Method of detecting RF powder delivered to a load and complex impedance of the load

摘要

Methods and systems of detecting one or more characteristics of a load are disclosed. One or more characteristics of a first signal may be detected at the output of a Radio Frequency (RF) power generator. The first signal may have a fundamental frequency. The one or more characteristics of the first signal may be sampled at a sampling frequency to produce a digital sampled signal. The sampling frequency may be determined based on a function of the fundamental frequency of the first signal. One or more characteristics of a load in communication with the RF power generator may then be determined from the digital sampled signal.