发明名称 WASHING DEVICE OF HEATER BLOCK FOR WIRE BONDERS
摘要 A heater block cleaning apparatus for wire bonder is provided to standardize a cleaning work and to enhance efficiency of the cleaning work by automating a process for cleaning uniformly a heater block. An opening(11) is formed at one side of a front surface of a case(10). An actuator(21) is connected to one side of a tray(20) for receiving a heater block in order to move selectively the tray into the inside of the case. A brush unit(40) is installed at an upper side of the inside of the case. The brush unit is connected to an elevator system includes an elevating cylinder. The brush is rotated by using driving force of a motor. A vibration unit is coupled with a bottom of the tray and includes a pair of cylinders in order to move the tray in front, rear, left, and right directions.
申请公布号 KR100777090(B1) 申请公布日期 2007.11.19
申请号 KR20060085497 申请日期 2006.09.06
申请人 CUTTING EDGESEMI TECH. CO., LTD. 发明人 LIM, EUN JAE
分类号 H01L21/60 主分类号 H01L21/60
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