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发明名称
形成光阻结构的方法
摘要
一种形成光阻结构的方法,包含沉积一第一光阻层材料于一第一层体上,选择性地曝光部分之第一光阻层以在第一光阻层上形成曝光部分及未曝光部分。在不显影第一光阻层下,沉积一第二光阻层于第一光阻层上包含曝光部分及未曝光部分,第二光阻层可在一酸存在下进行交联反应。处理第一光阻层,藉由酸使第一光阻层之曝光部分或未曝光部分其中之一形成复数个第二光阻层的交联部分。之后,显影第二光阻层以移除未交联的部分。
申请公布号
TW200743139
申请公布日期
2007.11.16
申请号
TW096113676
申请日期
2007.04.18
申请人
台湾积体电路制造股份有限公司
发明人
张庆裕
分类号
H01L21/027(2006.01);G03F7/00(2006.01);G03F7/095(2006.01);G03F7/26(2006.01);G03F7/40(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
新竹市新竹科学工业园区力行六路8号
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