发明名称 TEMPERATURE CONTROL DEVICE AND TEMPERATURE CONTROL METHOD
摘要 Pressing an electronic device (2) to be tested to contact terminals (132a and 132b) while bringing a heater (112) having equal or close temperature change characteristics to those of the electronic device to be tested by a test pattern, transmitting a test pattern to the electronic device to be tested in this state, and controlling a power consumption of a heater so that total power of a power consumption of the electronic device to be tested by the test pattern and a power consumption of the heater becomes a constant value.
申请公布号 KR100777023(B1) 申请公布日期 2007.11.16
申请号 KR20067003311 申请日期 2006.02.17
申请人 发明人
分类号 H01L21/66;G01R31/319 主分类号 H01L21/66
代理机构 代理人
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