| 摘要 |
A method for manufacturing a micro-heater for a gas sensor and a micro-heater manufactured by the same are provided to improve insulation performance by forming an insulation space by using a dry etching method. A micro-heater for a gas sensor includes first and second insulation films(2,10), a wafer(1), a sacrificial layer(3), a plurality of insulation layers(4,6,8), a heater(5), a temperature sensor(7), a gas detecting film(9), and an etching hole(11). The first insulation film, the sacrificial layer, the insulation layers(4), the heater and the insulation later(6), the temperature sensor made of aluminum and the insulation layer(8), the gas detecting film made of zinc oxide, and the second insulation film are formed on the wafer in sequence. The etching hole is formed on the second insulation layer, and a U-type insulation space(12) is formed between the heater and the wafer through the etching hole.
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