| 摘要 |
A diaphragm for a CMP apparatus is provided to improve the strength and ductility of a diaphragm by suitably installing the diaphragm according to a gap and a relative transfer distance between a rotation unit and a holder. An outer sealing ring(32) is mounted on the inner sidewall of a rotation unit. An inner sealing ring(36) is mounted on the outer sidewall of a holder. A connection ring(34) is installed between the outer sealing ring and the inner sealing ring. The holder is inserted into the rotation unit, and the outer sidewall of the holder adjoins the inner sidewall of the rotation unit. The width of the connection ring is designed according to a gap(d) and a maximum relative transfer distance(L) between the outer sealing ring and the inner sealing ring. The outer sealing ring, the connection ring and the inner sealing ring can be made of a rubber layer and a fiber layer, respectively. |
