| 摘要 |
PROBLEM TO BE SOLVED: To avoid cracking by preventing progress of roughness of a film at a boundary surface between different metals. SOLUTION: An oxide film layer 5 comprising a hafnium oxide film layer or an aluminum oxide film layer is formed at a boundary between a first metal film layer 3 comprising aluminum and a second metal film layer 2 adjacent to the first metal film layer and comprising hafnium. The first metal film layer comprises aluminum and the second metal film layer comprises chromium 6 or silver 7. The first metal film layer comprises chromium 6 and the second metal film layer comprises silver 7. COPYRIGHT: (C)2008,JPO&INPIT
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