发明名称 TURBOMOLECULAR PUMP SYSTEM FOR GAS SEPARATION
摘要 PROBLEM TO BE SOLVED: To provide a gas separation process utilizing momentum separation to be used in the field of gas separation for separating a gas mixture comprising gas components having a very small physical property difference with each other, which process is particularly useful for separating isotopes or isotopic compounds. SOLUTION: A system constituted of N separation stages 801 to 809 for separating a mixture of gases is disclosed. Each of the stages 801 to 809 is comprised of a housing, a turbomolecular pump assembly equipped with an inlet end and an outlet end, a first chamber disposed adjacent to the inlet end and equipped with an inlet port and a first outlet port, a second chamber disposed adjacent to the outlet end and equipped with a second outlet port. The inlet port of the n-th separation stage is connected to the first outlet port of the adjacent (n+1)-th stage. The second outlet port of the n-th stage is connected to the inlet port of the (n+1)-th stage. The first chamber of the n-th stage wherein n is 1 and the second chamber of the n-th stage wherein n is N each can take in a corresponding separated gas from a first product gas outlet or a second product gas outlet respectively. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007296517(A) 申请公布日期 2007.11.15
申请号 JP20070094187 申请日期 2007.03.30
申请人 AIR PRODUCTS & CHEMICALS INC 发明人 MCDERMOTT WAYNE THOMAS
分类号 B01D53/24;B01D59/20;B04B5/08;F04D19/04 主分类号 B01D53/24
代理机构 代理人
主权项
地址