发明名称 END SECTION INSPECTING APPARATUS
摘要 <p>An end section inspecting apparatus is provided with an illuminating means (5) for applying diffused light to an end section of a flat-plate-like object (1) to be inspected, from positions above or other than below the front surface or the rear surface of an object to be inspected; an imaging means (4) for imaging the end section from a position vertical to a surface parallel to the front surface or the rear surface of the object; and an inspecting means (7) for inspecting the status of a portion inclined from the front surface or the rear surface of the end section, by using the image obtained by the imaging means.</p>
申请公布号 WO2007129691(A1) 申请公布日期 2007.11.15
申请号 WO2007JP59471 申请日期 2007.05.07
申请人 NIKON CORPORATION;SAKAGUCHI, NAOSHI 发明人 SAKAGUCHI, NAOSHI
分类号 G01N21/956;H01L21/66 主分类号 G01N21/956
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