| 摘要 |
A heat treatment device, a heat treatment method, and a storage medium are provided to obtain constant processing accuracy by maintaining internal temperature of a heat treatment chamber at processing temperature through closing/opening a cover. A heating plate(51) is installed in an inside of a heat treatment chamber(54). The heat treatment chamber is opened or closed according to operations of a cover(55). A heat treatment method includes a process for maintaining the temperature of the heat treatment chamber at the predetermined temperature by operating the cover, a process for transferring a target substrate into the inside of the heat treatment chamber, and a process for performing a heat treatment process by heating the target substrate. The process for opening and shutting the cover is performed repeatedly. The predetermined temperature is set on the basis of the heat treatment temperature. |
