INFRARED SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

Disclosed is an infrared sensor having good thermoelectric conversion efficiency and good responsibility, wherein thermal insulation in an infrared sensing portion is improved. Also disclosed is a method for manufacturing such an infrared sensor. Specifically disclosed is an infrared sensor (10) comprising a first substrate (12) which is made of a thermoelectric material and a second substrate (14). The first substrate (12) is supported by a post (20), which is made of an electrode material, spaced apart from the second substrate (14). A sensing electrode (16) and an extraction portion (18) extracted therefrom are formed on the first substrate (12) and covered with an infrared absorbing film (24). The post (20) is connected with the extraction portion (18), and an external terminal connection electrode (26) to be connected with the post (20) is formed.