INSPECTION APPARATUS OF FPD PATTERN UNDERGOING FIRING USING LIGHT SPECTRUM OF THE PATTERN

摘要

An apparatus for inspecting an FPD pattern undergoing firing using light spectrum of the pattern is provided to control a firing process by quickly deciding whether the firing is excessive or not by comparing specific spectrum strength of optimum firing state with the actual strength numerically. An apparatus for inspecting an FPD pattern undergoing firing using light spectrum of the pattern includes a spectrometer(150) and a comparing/deciding instrument(140). The spectrometer measures a light spectrum of the FPD pattern formed on the board. The comparing/deciding instrument decides that the firing of the FPD pattern is excessive if the strength of the specified spectrum is greater than a designated standard in a light spectrum measured through the spectrometer.