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发明名称
Verfahren zur Bestimmung von physikalischen Eigenschaften einer optischen Schicht oder eines Schichtsystems
摘要
申请公布号
DE502004005147(D1)
申请公布日期
2007.11.15
申请号
DE200450005147T
申请日期
2004.09.07
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
LOTZ, HANS-GEORG DR.;SCHROEDER, JUERGEN
分类号
G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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