| 发明名称 |
PHOTOMASK HAVING HALF-TONE PHASE SHIFT PORTION |
| 摘要 |
A photomask has a half-tone phase shift portion in a reticle alignment mark portion instead of a light transmissive portion so as to reduce an exposure light transmittance and reduce an influence from ghost.
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| 申请公布号 |
US2007264585(A1) |
申请公布日期 |
2007.11.15 |
| 申请号 |
US20070747316 |
申请日期 |
2007.05.11 |
| 申请人 |
ELPIDA MEMORY, INC. |
发明人 |
YOSHINO HIROSHI |
| 分类号 |
G03F1/32;G03F1/42;G03F1/68;G03F9/00;H01L21/027 |
主分类号 |
G03F1/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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