发明名称 Method for the production of a semiconductor component having a metallic gate electrode disposed in a double-recess structure
摘要 A semiconductor component, particularly a pHEMT, having a T-shaped gate electrode deposited in a double-recess structure, is produced with a method with self-adjusting alignment of the recesses and of the T-shaped gate electrode.
申请公布号 US2007264781(A1) 申请公布日期 2007.11.15
申请号 US20070800770 申请日期 2007.05.07
申请人 BEHAMMER DAG 发明人 BEHAMMER DAG
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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