| 摘要 |
<p>In a plasma treatment apparatus for performing plasma treatment by accommodating a substrate (11) in a treatment chamber (6), a fixed guide (12) and a movable guide (13) made of a ceramic are arrayed in an X direction (in a substrate transporting direction) for guiding both side end portions of the substrate held on a ceramic-made mounting plate (10), and both end portions of the movable guide (13) are supported by supporting members (18). In this construction, these supporting members (18) are fitted to fixed members (15A) and (15B) arranged in a Y direction with the mounting plate (10) placed therebetween, such that an interval in the Y direction is adjustable. Consequently, the ceramic-made guide member (13) can be mounted and demounted without directly bolting it, and it is possible to prevent the generation of an abnormal discharge by using as objects multiple product thin-type substrates (11) with different widthwise dimensions.</p> |
