发明名称 A SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device and a method for manufacturing the same are provided to improve HCI(Hot Carrier Injection) characteristics by improving the quality of a gate oxide layer without increasing a size of a transistor. An active region and a field region are defined by using an isolation layer(102). A polysilicon layer(106) is formed in a direction crossing the active region and the field region. A dielectric layer(108) is formed on an upper surface of the polysilicon layer. An etched region of dielectric layer(110) is formed by etching a part of the dielectric layer formed on an upper surface of the field region. The etched region of dielectric layer is formed with a shape of rectangle or a shape of circle. A lateral size and a longitudinal size of the etched region of dielectric layer having the shape of rectangle or the shape of circle are equal to each other or different from each other.
申请公布号 KR20070109666(A) 申请公布日期 2007.11.15
申请号 KR20060042980 申请日期 2006.05.12
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, SUN MI
分类号 H01L21/335;H01L21/336 主分类号 H01L21/335
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